Synthesis and characterization of carbon compound nanostructures for electron field emission and low-k dielectrics
| Autor: | Shih-Hsiang Lai, 賴識翔 |
|---|---|
| Rok vydání: | 2004 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 92 In this work, various amorphous fluorinated carbon (a-C:F) compounds have been synthesized by an electron cyclotron resonance chemical vapor deposition (ECR-CVD) system in a mixture of CF4, C2H2, and N2 as precursors. N-doped a-C:F thin films was prepared on Si substrate for low-dielectric-constant (low k) materials as an interlayer dielectric (ILD). Others are the a-C:F nanostructures, including nano-porous films, nanoparticles and nanowires on a porous alumina template substrate for the potential application in flat panel display field emitters and optoelectronic devices. The a-C:F films were analyzed by AFM, XPS, as well as the measurements of film thickness and dielectric constant. Although the dielectric constant of the a-C:F film increases with the incorporated nitrogen, the thermal stability of the N-doped a-C:F films can be improved owing to their highly cross-linking structures. The a-C:F nanostructures have been synthesized directly by an ECR-CVD system in a short period of time using the mixture of CF4, C2H2 and Ar as precursors. The a-C:F nanostructure was verified by FESEM and HRTEM and the chemical bonding nature of the a-C:F nanostructures were investigated by Raman spectroscopy and XPS, respectively. The C-Fx bonds would be desirable and improve the electron field-emission properties of the a-C:F nanostructures. The a-C:F nano-porous films with low turn-on field (1.8 V/mm) are apparently lower than other types of the a-C:F nanostructures ( ~ 2.1 V/mm). The a-C:F nanostructures posses a great field-enhancement factor b (2500-4000) than other non-aligned multiwall nanotubes (800-2700). However, the a-C:F nanostructures follow the Fowler-Nordheim characteristics only in the medium emission current region and they both deviate in the low (< 0.04 mA/cm2 ) and high ( > 0.7 mA/cm2 ) emission current region accounting for F atom effect (low emission current) and adsorbate effect (high emission current). |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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