Design, analysis, and fabrication of electrostatic hemispheric deformable focusing mirror
| Autor: | Shang-wei Tsai, 蔡尚瑋 |
|---|---|
| Rok vydání: | 2004 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 92 To avoid warpage and have less driven voltage, two new types of electrostatic actuated micro-focusing mirror based on bulk micromachining and surface micromachining is designed in this thesis. One is circular clamped and the other is center-anchored. Simulation by finite element is used to analyze the multi-physics problems. The devices are fabricated by MEMS process. From the results of simulation analysis, deformations of focusing mirror under electrostatic force are obtained. Comparing with theoretical results of using the theory of plates and shells, the numerical results show that the nonlinear behavior yields the larger deflection. From the profile of focusing mirror, the focal length can be obtained by the least square method. The relations between driven voltage and deformation, driven voltage and focal length, and gap and pull-in voltage are obtained. The simulation analysis results can be used as database of parametric design for component and fabrication process. For manufacturing the two types of micro deformable focusing mirror, the fabrication processes are designed. Using bulk micromachining produce hemispheric curved surface profile on the substrate, and using surface micromachining fabricate micro deformable focusing mirror on hemispheric curved surface. Finally, the circular clamped micro deformable focusing mirror is fabricated successfully. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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