On the Fabrication and Performance Analysis of an Electro-thermal Microactuator
| Autor: | Jeng-Nan Hung, 洪政男 |
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| Rok vydání: | 2004 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 92 Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drives the whole system and enables the system to operate effectively. This thesis uses polysilicon as the structure material of electro-thermal microactuators. To investigate its performance, the electro-thermal microactuator is fabricated and analyzed. By using surface micromachining process, the electro-thermal actuators are fabricated. And with numerical methods of finite element, the performance of electro-thermal actuators could be analyzed for details. Therefore, the stresses obtained from the finite element analysis are used in fatigue analysis. Due to heat generation from applied voltages and thermal expansion of material, the microactuator will deform and can be used as large power actuators. From the linear relation between stresses and applied voltages, the maximum stresses of different applied voltages can be used to evaluate the fatigue life by the stress-life method. The results show the size of devices is one of the most important factors affecting the fatigue life. Under the same applied voltage, the larger cold arm sizes will yield the shorter fatigue life. Considering the effect of flexible beams connecting the cold and hot arms, the longer flexible beams will have the longer fatigue life under the same applied voltages. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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