Design and Construction of Real-Time Dual-Axes Nanometer Resolution Interferometer
| Autor: | Zeng-De Chen, 陳政德 |
|---|---|
| Rok vydání: | 2003 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 91 With the rapid development of MEMS and nano-technology, the need for non-contact precision test instrument is increasing as day goes by. To fully characterize micro-systems, a precision dynamic metrology instrument is expected to possess capabilities such as measuring real-time vibration information along all three axes, non-contact, etc. Out of all available setups and configurations, single-axis or multi-axes laser Doppler interferometers were considered the top choice and thus were extensively studied over the last 30 years. In this dissertation, the goal is to design and construct a laser Doppler interferometer/anemometer that has nanometer resolution for measuring vibration and displacement of small objects. Circular interferometry was adopted to perform the out-of-plane measurement. Heterodyne interferometer developed by using acousto-optical modulator (AOM) to shift the light beam frequency was used to measure the in-plane motion. To uncouple the out-of-plane and in-plane measurement capabilities, polarization states of the two set of metrology light beams were purposely set into orthogonal. This newly developed optical configuration provides us with an opportunity to measure the out-of-plane and the in-plane vibration information of same point simultaneously. Furthermore, field-programmable-gated-array (FPGA), High-speed AD/DA card, and direct-input/output (DIO) card, etc. were integrated and developed to perform real-time signal processing tasks. The arctangent phase decoding method was implemented for the out-of-plane measurement case and the all-digital phase-locked loop frequency tracking method was implemented for the in-plane measurement situations. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
| Externí odkaz: |
|