Chlorine enhanced growth of nanocrystaline diamond films and nanocrystalline diamond/SiC composite films
| Autor: | Kuan Chen, 陳寬 |
|---|---|
| Rok vydání: | 2003 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 91 Nanodiamond films have been synthesized using CCl4/CH4/H2 in a hot-filament chemical vapor deposition reactor. The thicknesses of the nanodiamond films decreased when the concentration of CH4 increased. XRD、Raman and TEM analyses show that the average grain sizes of the nanodiamond were in the ranges of 4-17nm and decreased when the concentration of CH4 increased. AFM analyses show that the nanodiamond films possess a typical rms roughness of 20nm. Growth precursor of the nanodiamond film was also investigated using RGA in this study. RGA analyses reveal that the carbon species in gas phase do not reach a partial equilibrium state. CH3 radicals are suggested to be the growth precursor of nanodiamond films in this system. In addition, nanodiamond/silicon carbide composite films were deposited at a SiCl4/CCl4/H2 flow rates of 0.5/2.5/97 sccm and a substrate temperature of 680℃. TEM analyses reveal that the average grain size of the nanodiamond/SiC composite film was 25nm. AFM analyses shows that the rms roughness of the composite film was 11nm. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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