A study of the interfacial reaction in the Au/Si(100) and Au/Si(111) systems
| Autor: | Yi-fan Lai, 賴一凡 |
|---|---|
| Rok vydání: | 2002 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 90 This study is focused on the phase transformation of the interface and gold film growth on the Si(100) and Si(111) substrate with/without native oxide by thermal evaporation. Specimens were submitted to heat treatment at 300℃ to 900℃ in vacuum chamber and investigated by X-ray diffractometer (XRD), high resolution transmission electron microscope(HRTEM), energy-dispersive spectrometer(EDS), scanning electron microscope (SEM), and four point probe. The results of XRD analysis indicated that most of the Au grains were oriented with direction after evaporation, and oriented with the direction normal to the substrate surface after heat treatments. HRTEM analysis suggested that Au and Si atoms had interdiffusion after evaporation. HRTEM also detected the changes of the structure close to the interface and the amorphous formed by the Au-Si solid solution. The results of EDS analysis explained the interdiffusion of Au and Si. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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