Micropostioning thickness control system of photoresist lay on LCD back-lighted glass plate
| Autor: | K. H. Chang, 章廣賢 |
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| Rok vydání: | 2000 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 88 The study researches a micropositioning plate and a long-range mechanism. After combining, the whole system could be applied on lying photoresist on LCD back-lighted glass plate. For the thickness control needs of micrometer, the study offers the micropositioning stage. The stage takes PZT as actuator and leaf spring as moving linkage. At the same time, we put LVDT on the stage for detecting the relative distance between the glass and the mold. We design a fixture holding the glass plate for the relative linear motion between the glass and the mold. There is a coarse plate under the fixture for linear moving and the glass plate is above it. There are micro-adjusting linkages in the fixture for regulating the tilt of the LCD plate. After doing experiences on the system, the paper measures the system error and designs a controller for micro-positioning. The micropositioning plate has 0.1 mm resolution and 47 mm moving distance. The systematic error of the long-range mechanism is displayed as normal distribution. We take the whole system as a time-delayed system and write LabVIEW program for feedback control. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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