Autor:	Chien-Yuan Lee, 李建源
Rok vydání:	2000
Druh dokumentu:	學位論文 ; thesis
Popis:	88 The reliability of oxide films is an important issue for ultra large scale integrated (ULSI) IC''s, especially as oxide is getting thinner and thinner. It is known for several years that thinner oxides can have anomalous failure mode. However, despite the large research attention in recent years, the detailed mechanisms of the so-called soft breakdown (SBD) in ultra thin
Databáze:	Networked Digital Library of Theses & Dissertations
Externí odkaz:	http://ndltd.ncl.edu.tw/handle/10014520021989097889 Zobrazit plný text záznamu