Fabricated microlens by using an excimer laser
| Autor: | Y. C. Kuo, 郭儀正 |
|---|---|
| Rok vydání: | 2000 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 88 In this work, we try to fabricate single microlens and microlens arrays on PMMA by using an excimer laser with well designed metal masks. First, we measured the etching rates for various mask opening areas and fluences to obtain the dependence of etching rate on the fluence and the mask opening area. Then, using re-exposure method to fabricate multi-level two dimension axially symmetric planar convex microlens, based on the etching rate relationship obtained by the above procedure. Using surface profile meter to measure the cross-section of the microlens, and using multi-function scanning electron microscope to observe the three dimensional structure of the resultant microlens, we examine the feasibility of the fabrication. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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