Development and Applications of High Precision Six-Degree-of-Freedom Error Measurement Systems
| Autor: | Chen, Mu-Jung, 陳木榮 |
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| Rok vydání: | 1998 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 86 This paper proposes two new six-degree-of-freedom measurement systems. The f irst six-degree-of-freedom measurement system has the capability to measure si multaneously all six motion errors of a linear stage. Another six-degree-of-fr eedom measurement system has been developed for simultaneous measurements of s ix motion errors of an X-Y stage driven by double-actuator. The measurement s ystem for linear stages employs three parallel laser beams to detect three rel ative linear distances of a moving body by Doppler effect so that the position ing, yaw and pitch errors can be separated. With an additional beam splitter a nd two quadrant photo detectors to detect the lateral shifts of the returned b eams, the remaining two straightness errors and roll error can be obtained at the same time. In comparison with the HP5528A system, the straightness error i s about 1 um, and angularerrors are all about 1 arcsec. The measurement syst em for two-axis moving stages employs four laser Doppler scales and two quadra nt photo detectors to detect the positions and the rotations of an optical ref lection device mounted on the top of the X-Y stage. In comparison with the HP5 528A system, the linear positioning accuracy of the system is better than 0.1 um, the vertical straightness error is about 1.5 um. The yaw and pitch errors are about 1 arcsec, and the roll error is about 3 arcsecs.Base on the accuracy consideration for optical system, this paper proposes the error model of the two-axis and double-actuator stage and suggests some methods to improve the sy stem accuracy. Finally, the two-axis measurement system is setup on the top of a high precision stage combined by an air bearing X-Y stage and a piezoelectr ic stage. The developed system can measure simultaneously the stage motion err ors in six-degree-of-freedom and provide the real-time compensation signal. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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