1,4-diazadiene imido complexes of group V and VI elements and their application in chemical vapour deposition of TaN films
| Autor: | Merkoulov, Alexei A. |
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| Rok vydání: | 2006 |
| Popis: | Marburg, Univ., Diss., 2005. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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