Design, fabrication, and characterization of electrostatically-actuated silicon micro-mirrors a thesis
| Autor: | Chesbro, Dylan. Savage, Richard N. |
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| Jazyk: | angličtina |
| Rok vydání: | 2010 |
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| Zdroj: | Click here to view. |
| Popis: | Thesis (M.S.)--California Polytechnic State University, 2010. Title from PDF title page; viewed on May 15, 2010. Major professor: Richard Savage, Ph.D. "Presented to the faculty of California Polytechnic State University, San Luis Obispo." "In partial fulfillment of the requirements for the degree [of] Master of Science in Engineering with a Specialization in Materials Engineering." "April 2010." Includes bibliographical references (p. 159-161). |
| Databáze: | Networked Digital Library of Theses & Dissertations |
| Externí odkaz: |
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