Feasibility of Ellipsometric sensor development for using during PECVD SIOx coated polymer product manufacturing : a thesis

Autor: Helms, Daniel Lynn. Savage, Richard N.
Jazyk: angličtina
Rok vydání: 2009
Předmět:
Zdroj: Click here to view.
Popis: Thesis (M.S.)--California Polytechnic State University, 2009.
The letter x is subscripted in the title. Title from PDF title page; viewed on October 23, 2009. Major professor: Dr. Richard Savage. "Presented to the faculty of California Polytechnic State University, San Luis Obispo." "In partial fulfillment of the requirements for the degree [of] Master of Science in Materials Engineering." "September 2009." Includes bibliographical references (p. 115-121). Also available on microfiche.
Databáze: Networked Digital Library of Theses & Dissertations