Feasibility of Ellipsometric sensor development for using during PECVD SIOx coated polymer product manufacturing : a thesis
Autor: | Helms, Daniel Lynn. Savage, Richard N. |
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Jazyk: | angličtina |
Rok vydání: | 2009 |
Předmět: | |
Zdroj: | Click here to view. |
Popis: | Thesis (M.S.)--California Polytechnic State University, 2009. The letter x is subscripted in the title. Title from PDF title page; viewed on October 23, 2009. Major professor: Dr. Richard Savage. "Presented to the faculty of California Polytechnic State University, San Luis Obispo." "In partial fulfillment of the requirements for the degree [of] Master of Science in Materials Engineering." "September 2009." Includes bibliographical references (p. 115-121). Also available on microfiche. |
Databáze: | Networked Digital Library of Theses & Dissertations |
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