Modeling and prediction of stiction in micro electro mechanical systems (MEMS)

Autor:	Hariri, Alireza.
Jazyk:	angličtina
Rok vydání:	2006
Popis:	Thesis (Ph. D.)--University of Toronto, 2006. Source: Dissertation Abstracts International, Volume: 67-07, Section: B, page: 4060. Includes bibliographical references.
Databáze:	Networked Digital Library of Theses & Dissertations
Externí odkaz:	http://link.library.utoronto.ca/eir/EIRdetail.cfm?Resources__ID=442558&T=F Zobrazit plný text záznamu