Transient Phenomena and Impurity Relocation in SIMS Depth Profiling using Oxygen Bombardment: Pursuing the Physics to Interpret the Data [and Discussion]

Autor:	Wittmaack, K., Drummond, I. W.
Zdroj:	Philosophical Transactions: Mathematical, Physical and Engineering Sciences, 1996 Nov . 354(1719), 2731-2764.
Databáze:	JSTOR Journals
Externí odkaz:	https://www.jstor.org/stable/54738 Zobrazit plný text záznamu