Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor
Autor: | Banks, H. T., Beeler, S. C., Kepler, G. M., Tran, H. T. |
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Zdroj: | SIAM Journal on Applied Mathematics, 2002 Apr 01. 62(4), 1251-1280. |
Databáze: | JSTOR Journals |
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