Porous Low Dielectric Constant Materials for Microelectronics

Autor:	Baklanov, Mikhail R., Maex, Karen
Zdroj:	Philosophical Transactions: Mathematical, Physical and Engineering Sciences, 2006 Jan . 364(1838), 201-215.
Databáze:	JSTOR Journals
Externí odkaz:	https://www.jstor.org/stable/25190180 Zobrazit plný text záznamu