SIMULATION OF COUPLED IMPURITIES DIFFUSION UNDER OXIDIZING CONDITIONS. APPLICATION TO THE OPTIMIZATION OF THE p‐WELLS IN CMOS TECHNOLOGY

Autor:	DEPEURSINGE, Y., GUEX, L., MORET, J.M., WEISS, P.
Zdroj:	COMPEL -The international journal for computation and mathematics in electrical and electronic engineering, 1983, Vol. 2, Issue 4, pp. 149-160.
Databáze:	Emerald Insight
Externí odkaz:	http://www.emeraldinsight.com/doi/10.1108/eb009980 Zobrazit plný text záznamu