MEMS flexible conformal hydrophone based on heterogeneous integration technology
Autor: | Zhang, Xiangkai, Wang, Renxin, Cao, Wenping, Liu, Guochang, Tan, Haoyu, Li, Haoxuan, Wu, Jiaxing, Zhang, Guojun, Zhang, Wendong |
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Zdroj: | Sensor Review, 2024, Vol. 44, Issue 3, pp. 395-403. |
Databáze: | Emerald Insight |
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