MEMS flexible conformal hydrophone based on heterogeneous integration technology

Autor:	Zhang, Xiangkai, Wang, Renxin, Cao, Wenping, Liu, Guochang, Tan, Haoyu, Li, Haoxuan, Wu, Jiaxing, Zhang, Guojun, Zhang, Wendong
Zdroj:	Sensor Review, 2024, Vol. 44, Issue 3, pp. 395-403.
Databáze:	Emerald Insight
Externí odkaz:	http://www.emeraldinsight.com/doi/10.1108/SR-01-2024-0032 Zobrazit plný text záznamu