A novel approach for the fabrication of low-stress bimorph RF-MEMS switches
| Autor: | Sharma, Hitesh Kumar, Rani, Shalu |
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| Zdroj: | Multidiscipline Modeling in Materials and Structures, 2017, Vol. 13, Issue 1, pp. 116-121. |
| Databáze: | Emerald Insight |
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