Wafer damage issue study by heavy Al wire wedge bonding
Autor: | Zhang, Hanmin, Hu, Ming, Zong, Fei, Yin, Baoguan, Ye, Denghong, He, Qingchun, Wang, Zhijie |
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Zdroj: | Microelectronics International, 2014, Vol. 31, Issue 2, pp. 129-136. |
Databáze: | Emerald Insight |
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