Wafer damage issue study by heavy Al wire wedge bonding

Autor: Zhang, Hanmin, Hu, Ming, Zong, Fei, Yin, Baoguan, Ye, Denghong, He, Qingchun, Wang, Zhijie
Zdroj: Microelectronics International, 2014, Vol. 31, Issue 2, pp. 129-136.
Databáze: Emerald Insight