Recent advances and applications of abrasive processes for microelectronics fabrications

Autor:	Zhong, Zhao-Wei
Zdroj:	Microelectronics International, 2019, Vol. 36, Issue 4, pp. 150-159.
Databáze:	Emerald Insight
Externí odkaz:	http://www.emeraldinsight.com/doi/10.1108/MI-05-2019-0024 Zobrazit plný text záznamu