Development of a current mirror-integrated pressure sensor using CMOS-MEMS cofabrication techniques

Autor: Kumar, Shashi, Rathore, Pradeep Kumar, Panwar, Brishbhan Singh, Akhtar, Jamil
Zdroj: Microelectronics International, 2018, Vol. 35, Issue 4, pp. 203-210.
Databáze: Emerald Insight