An efficient design of dual-axis MEMS accelerometer considering microfabrication process limitations and operating environment variations

Autor:	Tahir, Muhammad Ahmad Raza, Saleem, Muhammad Mubasher, Bukhari, Syed Ali Raza, Hamza, Amir, Shakoor, Rana Iqtidar
Zdroj:	Microelectronics International, 2021, Vol. 38, Issue 4, pp. 144-156.
Databáze:	Emerald Insight
Externí odkaz:	http://www.emeraldinsight.com/doi/10.1108/MI-02-2021-0023 Zobrazit plný text záznamu