Structural and mechanical properties of a-axis AlN thin films growth using reactive RF magnetron sputtering plasma

Autor:	Bakri, Anis Suhaili, Nayan, Nafarizal, Soon, Chin Fhong, Ahmad, Mohd Khairul, Abu Bakar, Ahmad Shuhaimi, Abd Majid, Wan Haliza, Raship, Nur Amaliyana
Zdroj:	Microelectronics International, 2021, Vol. 38, Issue 3, pp. 99-104.
Databáze:	Emerald Insight
Externí odkaz:	http://www.emeraldinsight.com/doi/10.1108/MI-02-2021-0015 Zobrazit plný text záznamu