Influence of different etching methods on the structural properties of porous silicon

Autor:	Zulkifli, Fatimah, Radzali, Rosfariza, Abd Rahim, Alhan Farhanah, Mahmood, Ainorkhilah, Mohd Razali, Nurul Syuhadah, Abu Bakar, Aslina
Zdroj:	Microelectronics International, 2022, Vol. 39, Issue 3, pp. 101-109.
Databáze:	Emerald Insight
Externí odkaz:	http://www.emeraldinsight.com/doi/10.1108/MI-01-2022-0009 Zobrazit plný text záznamu