Surface quality prediction and lapping process optimisation on the fixed-abrasive lapping plate of sapphire wafers
| Autor: | Wang, Yanfu, Wang, Xin, Liu, Lifei |
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| Zdroj: | Microelectronics International, 2022, Vol. 39, Issue 4, pp. 175-187. |
| Databáze: | Emerald Insight |
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