Effect of N2 gas fractions on improvement of structural, optical, and electrical properties of Cu3N thin films deposited by reactive radio frequency magnetron sputtering
| Autor: | Majumder, Shanta a, Ohishi, Miho a, Saito, Katsuhiko a, Guo, Qixin a, Patwary, Md Abdul Majed b, Tanaka, Tooru a, ⁎ |
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| Zdroj: | In Journal of Alloys and Compounds Communications January 2025 5 |
| Databáze: | ScienceDirect |
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