Study on the performance of InGaN-based micro-LED by plasma etching combined with ion implantation process
| Autor: | Hsu, Yun-Cheng, Hsu, Yu-Hsuan, Lin, Chien-Chung, Wu, Ming Hsien, Kuo, Hao Chung, Wuu, Dong-Sing, Hsiao, Ching-Lien, Horng, Ray-Hua |
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| Zdroj: | In Next Nanotechnology 2025 7 |
| Databáze: | ScienceDirect |
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