Introduction of dislocation filtering with different ammonia flows in low-temperature grown AlN (< 1200 °C)

Autor: Yusuf, Yusnizam, Md Taib, Muhamad Ikram, Azmi, Nor Syafiqah, Ahmad, Mohd Anas, Zainal, Norzaini
Zdroj: In Micro and Nanostructures November 2023 183
Databáze: ScienceDirect