Introduction of dislocation filtering with different ammonia flows in low-temperature grown AlN (< 1200 °C)
Autor: | Yusuf, Yusnizam, Md Taib, Muhamad Ikram, Azmi, Nor Syafiqah, Ahmad, Mohd Anas, Zainal, Norzaini |
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Zdroj: | In Micro and Nanostructures November 2023 183 |
Databáze: | ScienceDirect |
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