Preventing unwanted atomic layer deposition by liquid sealing
| Autor: | Wang, Haochuan, Yi, Zhibin, Li, Chun, Xia, Rui, Shao, Yan, Zhan, Shaohu, Feng, Wenshuai, Wen, Rui-Tao, Cheng, Xing, Luo, Guangfu, Yu, Yanhao |
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| Zdroj: | In Nano Trends September 2024 7 |
| Databáze: | ScienceDirect |
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