Modeling and random search optimization for the polysilicon CVD reactor

Autor: Xi, Bangwen a, b, Xiong, Gang a, c, Kozin, Kirill A. d, He, Chang a, b, Tamir, Tariku Sinshaw e, f, Song, Yonggang g, Liu, Xiong g, Shen, Zhen a, h, ⁎
Zdroj: In Results in Control and Optimization December 2023 13
Databáze: ScienceDirect