Fabrication of thin diamond membranes by [formula omitted] implantation

Autor: Basso, Luca, Titze, Michael, Henshaw, Jacob, Kehayias, Pauli, Cong, Rong, Ziabari, Maziar Saleh, Lu, Tzu-Ming, Lilly, Michael P., Mounce, Andrew M.
Zdroj: In Giant March 2024 17
Databáze: ScienceDirect