A touch mode MEMS capacitance diaphragm gauge
| Autor: | Li, Gang, Han, Xiaodong, Sun, Wenjun, Cheng, Yongjun, Li, Detian |
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| Zdroj: | In Measurement: Sensors December 2021 18 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Li, Gang, Han, Xiaodong, Sun, Wenjun, Cheng, Yongjun, Li, Detian |
|---|---|
| Zdroj: | In Measurement: Sensors December 2021 18 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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