A touch mode MEMS capacitance diaphragm gauge
Autor: | Li, Gang, Han, Xiaodong, Sun, Wenjun, Cheng, Yongjun, Li, Detian |
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Zdroj: | In Measurement: Sensors December 2021 18 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Li, Gang, Han, Xiaodong, Sun, Wenjun, Cheng, Yongjun, Li, Detian |
---|---|
Zdroj: | In Measurement: Sensors December 2021 18 |
Databáze: | ScienceDirect |
Externí odkaz: |