Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation
| Autor: | Shimizu, Yuki, Quan, Lue, Shin, Dong Wook, Matsukuma, Hiraku, Gao, Wei |
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| Zdroj: | In Measurement: Sensors December 2021 18 |
| Databáze: | ScienceDirect |
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