Low-temperature epitaxial Si on 4H-SiC using metal-induced crystallization
Autor: | Triendl, F., Pfusterschmied, G., Zellner, C., Artner, W., Hradil, K., Schmid, U. |
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Zdroj: | In Materials Letters: X June 2020 6 |
Databáze: | ScienceDirect |
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