Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation
| Autor: | Vallejo-Otero, V., Crespo-Monteiro, N., Valour, A., Donnet, C., Reynaud, S., Ollier, N., Blanc Mignon, M.F., Chatelon, J.P., Bleu, Y., Gamet, E., Jourlin, Y. |
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| Zdroj: | In Materials Today Advances December 2023 20 |
| Databáze: | ScienceDirect |
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