Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas
| Autor: | Nguyen, Tai a, b, Adjeroud, Noureddine a, Guennou, Mael b, Guillot, Jérôme a, Fleming, Yves a, Papon, Anne-Marie c, Arl, Didier a, Menguelti, Kevin a, Joly, Raoul a, b, Gambacorti, Narciso c, Polesel-Maris, Jérôme a, ∗ |
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| Zdroj: | In Results in Materials June 2020 6 |
| Databáze: | ScienceDirect |
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