Nanophotonic integrated active-passive InP membrane devices and circuits fabricated using ArF scanner lithography
| Autor: | Zozulia, Aleksandr, Bolk, Jeroen, van Veldhoven, Rene, Nazarikov, Gleb, Pogoretskiy, Vadim, Rihani, Samir, Berry, Graham, Williams, Kevin, Jiao, Yuqing |
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| Zdroj: | In Micro and Nano Engineering June 2024 23 |
| Databáze: | ScienceDirect |
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