Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components

Autor: Kanno, Shota, Omura, Taro, Wu, Jhen-Yang, Kurioka, Tomoyuki, Chen, Chun-Yi, Chakraborty, Parthojit, Machida, Katsuyuki, Ito, Hiroyuki, Miyake, Yoshihiro, Sone, Masato, Chang, Tso-Fu Mark
Zdroj: In Micro and Nano Engineering June 2024 23
Databáze: ScienceDirect