Comparing metal assisted chemical etching of N and P-type silicon nanostructures
| Autor: | Ohlin, Hanna, Frisk, Thomas, Sychugov, Ilya, Vogt, Ulrich |
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| Zdroj: | In Micro and Nano Engineering June 2023 19 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Ohlin, Hanna, Frisk, Thomas, Sychugov, Ilya, Vogt, Ulrich |
|---|---|
| Zdroj: | In Micro and Nano Engineering June 2023 19 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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