Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon
| Autor: | Chang, Bingdong, Liu, Xiyuan, Bertram, Nicolas, Han, Anpan |
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| Zdroj: | In Micro and Nano Engineering June 2023 19 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Chang, Bingdong, Liu, Xiyuan, Bertram, Nicolas, Han, Anpan |
|---|---|
| Zdroj: | In Micro and Nano Engineering June 2023 19 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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