MEMS resonators with electrostatic actuation and piezoresistive readout for sensing applications
| Autor: | Coelho, Cláudia, Machado, George, Jr, Cabral, Jorge, Rocha, Luís |
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| Zdroj: | In Micro and Nano Engineering August 2022 16 |
| Databáze: | ScienceDirect |
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