Chromium oxide – A novel sacrificial layer material for MEMS/NEMS and micro/nanofluidic device fabrication
| Autor: | Kanwal, Alokik, Ilic, B. Robert, Ray, Christopher H., Siebein, Kerry, Liddle, J. Alexander |
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| Zdroj: | In Micro and Nano Engineering August 2022 16 |
| Databáze: | ScienceDirect |
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