Hybrid microfabrication of 3D pyrolytic carbon electrodes by photolithography and additive manufacturing

Autor: Pan, Jesper Y., Rezaei, Babak, Anhøj, Thomas A., Larsen, Niels B., Keller, Stephan S.
Zdroj: In Micro and Nano Engineering June 2022 15
Databáze: ScienceDirect