Novel method of alignment to buried cavities in cavity-SOI wafers for advanced MEMS devices
| Autor: | Mountain, Christopher, Kluba, Marta, Bergers, Lambert, Snijder, Jaap, Dekker, Ronald |
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| Zdroj: | In Micro and Nano Engineering December 2019 5 |
| Databáze: | ScienceDirect |
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