Atmospheric pressure plasma directed assembly during photoresist removal: A new route to micro and nano pattern formation
| Autor: | Dimitrakellis, P., Smyrnakis, A., Constantoudis, V., Tsoutsou, D., Dimoulas, A., Gogolides, E. |
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| Zdroj: | In Micro and Nano Engineering May 2019 3:15-21 |
| Databáze: | ScienceDirect |
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