Patterning of metal acetylacetonate complex via extreme-ultraviolet light-induced chemical reaction and straightforward thermal development process
| Autor: | Byeon, Jinhwan, Kim, Dowon, Kim, Sangjin, Ahn, Jaeboong, Oh, Dong Suk, Yoon, Yang Hun, Jee, Hae-geun, Kim, Yejoon, Hwang, Chan-Cuk, Hong, Sukwon |
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| Zdroj: | In Materials Today Chemistry January 2025 43 |
| Databáze: | ScienceDirect |
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